Davies, Angela

UNCC

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Absolute distance (thickness) metrology using wavelength scanning interferometry 2009 1386 Wavelength scanning interferometry offers a new dimension in precision metrology by measuring the cavity length (thickness), the cavity length variation over the cavity area (flatness), and the optical homogeneity within a transparent cavity; without...
CALIBRATING SLOPE-DEPENDENT ERRORS IN PROFILOMETRY 2014 812 Optical profilometers, such as scanning white light interferometers and confocal microscopes, provide high resolution measurements and are widely utilized in many fields for measuring surface topography. The techniques are capable of high-speed s...